PROBLEM TO BE SOLVED: To make measurement more stable in measurement of values of a measuring object downsized and assembled in high density.;SOLUTION: A four-terminal resistance measuring device includes: a pair of contact-type probes 2a, 2b for current supply; an AC current supply section 4 for supplying a current I between solder ball bumps 21, 21 of a measuring object 20 via the pair of contact-type probes 2a, 2b for current supply; a pair of non-contact-type probes 3a, 3b for voltage measurement which are designed to detect voltages at the solder ball bumps 21, 21 by electrostatic capacity coupling; a voltage measurement section 6 for measuring a difference voltage Vd between the voltages at the solder ball bumps 21, 21 of the measuring object 20 detected by the probes 3a, 3b for voltage measurement with an AC current I being supplied to the measuring object 20 via the probes 3a, 3b for current supply; and a resistance value calculation section 7 for calculating a resistance value Rm of the measuring object 20 on the basis of the current value I of the AC current I supplied and the measured difference voltage Vd.;COPYRIGHT: (C)2014,JPO&INPIT
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