METHOD FOR PREVENTING COAGULATION AND ACCUMULATION OF BY-PRODUCT IN DRY VACUUM PUMP AND NITROGEN GAS TEMPERATURE RISING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for preventing coagulation and accumulation of by-product powder and nitrogen gas temperature rising device that can also be applied to a dry vacuum pump that has already been installed and being operated at present.;SOLUTION: This invention provides a nitrogen gas temperature rising device 1 enclosing a heater 20 and the like attached to and used at a dilution nitrogen gas supplying pipe C2 that has already been installed at a dry vacuum pump P for use in sucking inside of a chamber V of a vacuum device and a method for preventing coagulation and accumulation of by-product in the dry vacuum pump P to which the nitrogen gas temperature rising device 1 is attached.;COPYRIGHT: (C)2015,JPO&INPIT