DIFFUSION JUNCTION METHOD OF METAL MATERIAL AND DIFFUSION JUNCTION DEVICE OF METAL MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a diffusion junction method of a metal material and a diffusion junction device of the metal material, capable of junction excellent in mechanical and electric reliability, by forming an alloy layer of a uniform thickness.;SOLUTION: The diffusion junction method of the metal material comprises an exposure process of exposing one surface of a first metal material and one surface of a second metal material to reductive gas in a state of separating the first metal material and the second metal material and a pressurization process of pressurizing by allowing the one surface of the first metall material to abut on the one surface of the second metal material, and the reductive gas flows to the outside of the one surface of the first metal material in the surface direction of the one surface of the first metal material on the one surface of the first metal material, and flows to the outside of the one surface of the second metal material in the surface direction of the one surface of the second metal material on the one surface of the second metal material.;COPYRIGHT: (C)2015,JPO&INPIT