SCRIBING WHEEL, HOLDER UNIT, SCRIBING DEVICE, SCRIBING METHOD, AND PRODUCTION METHOD OF SCRIBING WHEEL

摘要

PROBLEM TO BE SOLVED: To provide a scribing wheel capable of suppressing change of a performance for parting a substrate, while facilitating formation of a deep and narrow groove in comparison with the case not having the present configuration, and to provide a holder unit, a scribing device, a scribing method, and a production method of the scribing wheel.;SOLUTION: In a scribing wheel in which a ridge line part used as a blade edge and a groove is formed alternately, the angle of a first edge angle formed between a ridge line part and an adjacent groove on one side is larger than the angle of a second edge angle formed between the ridge line part and an adjacent groove on the other side.;COPYRIGHT: (C)2015,JPO&INPIT