SCRIBING WHEEL, HOLDER UNIT, SCRIBING APPARATUS, METHOD FOR MANUFACTURING SCRIBING WHEEL, AND SCRIBING METHOD

摘要

(Task) In the case of dividing a ceramic substrate, etc., which is harder than a glass substrate by using a scribing wheel whose blade is only diamond, It provides a manufacturing method and a scribe method. (Solution) By using a scribing wheel 40 in which the blade 42 is made of diamond only, and the blade tip 43 is R chamfered with a radius of 0.8 to 5 μm, the R chamfer is used. Compared to an unprocessed scribing wheel, it is possible to drastically reduce the tooth gap.