CRYSTAL ANALYZER, COMPOSITE CHARGED PARTICLE BEAM DEVICE AND CRYSTAL ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a three-dimensional crystal orientation mapping indicating a crystal orientation in a normal direction of each plane of a plurality of planes of the polyhedron of a sample on the basis of EBSP data of a cross section formed on the sample.;SOLUTION: A crystal analyzer comprises: a measurement data storage part 13 storing EBSP data measured at electron beam irradiation points on a plurality of cross sections formed on a sample 5 with a predetermined interval and substantially parallel to each other; crystal orientation database 14 storing crystal orientation information corresponding to the EBSP; and a map construction part 15 that reads crystal orientations in normal directions of a plurality of planes of a polyhedron image obtained by arranging the plurality of cross sections on the basis of the interval, from the crystal orientation database 14 on the basis of EBSP data stored in the measurement data storage part 13, and constructs a three-dimensional crystal orientation map including the distribution of the crystal orientation in each normal direction of the plurality of planes.;COPYRIGHT: (C)2014,JPO&INPIT