WASTE GAS TREATMENT SYSTEM AND WASTE GAS TREATMENT METHOD OF CHLOROSILANE

摘要

PROBLEM TO BE SOLVED: To provide a technology for reducing a used amount of an absorbent for chlorosilane waste gas, dilution water of the absorbent and a waste water neutralizer.;SOLUTION: A waste water flow passage is formed so that a processing liquid flows to a downstream side scrubber from an upstream side scrubber in a predetermined overflow amount by a height difference of a processing liquid surface in a chemical tank between the mutual adjacent scrubbers of a plurality of scrubbers 10a-c. The respective scrubbers are provided with a waste gas introduction part 12 of chlorosilane, a pH gauge 13 for managing a hydrogen ion concentration index of the processing liquid in the chemical tank and an absorbent supply part 14 of the chlorosilane waste gas for setting a pH value of the processing liquid in the chemical tank to 11 or more. While, a dilution liquid supply part for adjusting the concentration of the absorbent in the chemical tank of the most upstream scrubber and forming an overflow of the processing liquid, is provided only in the most upstream scrubber 10a. The absorbent supplied to the most upstream scrubber 10a can be used even for the downstream side scrubbers 10b and c.;COPYRIGHT: (C)2014,JPO&INPIT