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COATED CRUCIBLE, AND PRODUCTION AND APPLICATION METHOD OF COATED CRUCIBLE

机译:包覆坩埚,包覆坩埚的生产与应用方法

摘要

PROBLEM TO BE SOLVED: To provide a crucible and a method in which a taking out property for taking out a solidified ingot from the crucible without generating a crack during solidifying and after solidifying in the crucible that holds a melted semiconductor material and produces an ingot.;SOLUTION: A crucible includes: a body that has a bottom and a side wall extending from the bottom to an upper side, wherein the bottom and the side wall regulate a cavity for holding a semiconductor material, or the side wall has an interior surface and an exterior surface; and a coating that exists at a part of the interior surface of the side wall and that contains silicon nitride and yttria as a sinter agent.;COPYRIGHT: (C)2014,JPO&INPIT
机译:解决的问题:提供一种坩埚和方法,其中从该坩埚中取出固化的锭的取出特性在固化期间以及在容纳熔融半导体材料并产生锭的坩埚中固化之后不产生裂纹的情况下。 ;解决方案:坩埚包括:具有底部和从底部延伸到上侧的侧壁的主体,其中底部和侧壁调节用于容纳半导体材料的空腔,或者侧壁具有内表面和外表面;并在侧壁内表面的一部分上存在一层涂层,该涂层含有氮化硅和氧化钇作为烧结剂。;版权所有:(C)2014,JPO&INPIT

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