STYLUS-TYPE MEASURING DEVICE AND HEIGHT MEASURING METHOD WITH STYLUS-TYPE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a measuring method capable of performing height measurement without performing a stop operation and shortening measurement time in a stylus-type measuring device.;SOLUTION: Height measurement of the surface of an object to be measured 1 with a stylus-type measuring device 10 is performed as follows. A moving section 24 of moving means 20 is driven in a direction where a stylus 50 approaches the surface of the object to be measured. In the state where the moving section is being driven, the stylus is allowed to contact the surface of the object to be measured 1 and stopped, and a position of the stylus on the surface of the object to be measured is determined. By continuing the drive of the moving section even after the position of the stylus is determined, the measuring device detects a relative position of the moving section to the stylus and also detects a relative position of the moving section to the a fixed section 22 while stylus holding means 40 is elastically deformed and the moving section is relatively displaced with respect to the stylus. Detection of the relative position of the moving section to the fixed section is performed on the basis of the detection of the relative position of the moving section with respect to the stylus. Measured height is obtained on the basis of the relative position of the moving section to the fixed section.;COPYRIGHT: (C)2014,JPO&INPIT