Processing apparatus for a glass substrate processing method of a glass substrate, a method of photomask or glass substrate for a magnetic disk glass substrate, and processing the repetitive glass substrate manufactured by the method

摘要

PROBLEM TO BE SOLVED: To provide a working device for a glass substrate, reducing scratches occurring on the glass substrate by removing metallic foreign matters, and also to provide a method of working a glass substrate, a glass substrate for a magnetic disk or a glass substrate for a photomask, manufactured by the method, and a method of repeatedly working a glass substrate.;SOLUTION: This working device for a glass substrate works the glass substrate held between an upper surface plate and a lower surface plate while supplying slurry or coolant thereto. The working device includes a magnet covered by a peelable covering material in a circulating passage through which the slurry or coolant is circulated.;COPYRIGHT: (C)2011,JPO&INPIT