The thermal conductivity and the method for measuring the interfacial thermal resistance using the thermal property measurement apparatus and the measuring device of the film

摘要

PROBLEM TO BE SOLVED: To provide a means for measuring thermal conductivity and interface thermal resistance of a thin film even if the thin film is metallic and its thickness is several microns or less.;SOLUTION: This measuring instrument, which is a thermophysical property measuring instrument for investigating the thermophysical properties of an object having a thin film on its surface, includes a heating light application means for applying alternating-current pump light of a prescribed frequency to the object, and a lock-in detection means for measuring the temperature response of an object surface caused by the application of the pump light by detecting the amplitude of probe light reflected from the surface and its phase change. This method is a method of measuring the thermal conductivity of the thin film existing on the surface of the object and the interface thermal resistance between the thin film and the substrate. The thermal conductivity of the thin film existing on the surface of the object and the thermal resistance are found based on an alternating-current temperature response (amplitude and phase) acquired by the measuring instrument.;COPYRIGHT: (C)2011,JPO&INPIT