Polycrystalline body manufacturing apparatus and polycrystalline body manufacturing method

摘要

PPROBLEM TO BE SOLVED: To provide a production device for obtaining a high purity polycrystal of a group 14 element in the periodic table such as silicon at high speed. PSOLUTION: The polycrystal production device includes: a reaction vessel 10 for forming the supercritical fluid state of the halide of a group 14 element in the periodic table introduced to the inside; electrodes 11, 12 provided at the inside of the reaction vessel 10 and performing plasma discharge; and a seed crystal 30 which is provided at the inside of the body of the reaction vessel 10 and allows silicon decomposed by plasma discharge to be deposited on the surface. PCOPYRIGHT: (C)2010,JPO&INPIT