Plasma electron density and electron temperature of the measuring probe and measurement device

摘要

PROBLEM TO BE SOLVED: To provide a measurement probe and a measurement device that are compact, and measure the electron density and electron temperature of plasma in a simple method without using an expensive measurement device.;SOLUTION: A measurement probe 10 includes two antennas 12 and 13 composed of metal wires differing in length, and the antennas each have two parallel metal wires bent and arranged in a rectangular plane area A and also are connected at one end in a U shape. The antennas 12 and 13 are sandwiched between insulating layers 14 and 15 differing in thickness, and configured to differ in sheath thickness dependence of resonance frequencies corresponding to the respective antennas. Consequently, electron density n_e and electron temperature T_e of the plasma can be calculated from resonance frequency dependency of the electron density n_e and the electron temperature T_e of the plasma.;COPYRIGHT: (C)2012,JPO&INPIT