Plasma density measurement device for determining electron density of plasma, particularly low pressure plasma has electrode areas of opposing polarities that are provided on surface of probe core of probe head

摘要

A probe (1) includes a probe head (2) in the form of a three-axis ellipsoid, and a shaft (3) that supplies high frequency to the probe head. The probe head has an outer covering (4) surrounding a probe core (5) whose surface (8) has electrode areas (9,10) of opposing polarities. An independent claim is included for the use of the plasma density measurement device.