A method for discriminating backscattered and incident electrons in an imaging electron detector with a thin electron sensitive layer.

摘要

Method of operating a device having a high energy particle detector is disclosed, the particles, the first incident transverse event, backscattered out of the device, contact near the mechanical structure, scattered back in the device, the particles resulting emitted backward scattering events, higher input and output events, as well as to generate an incident event. Exemplary method steps, by a separate event limits the dose rate to a level that ensures that no overlap, based on the total energy of each event, to discriminate the event and background and other events, based on the electron path shape, by discriminating between the incident cross events backscatter events, or, it is determined that the first event and the second event is to coincide with each other, the incident event on the basis of the electron path shape and energy level by separating from backscatter events, including the first incident crossing events, the outgoing backscatter event, higher input and output events, as well as to discriminate the incident event.