Pad surface state observation manner and pad surface state observation device

摘要

P To provide a method for observing propellent-actuated device surface state capable of accurately observing a surface state of a propellent-actuated device in its near-finished condition. PSOLUTION: The propellent-actuated device surface state observation method is characterized by: placing a prism 10 with its contact surface 10b abutting ON a polished surface of the propellent-actuated device 12; applying a prescribed pressing force to the prism 10 to press the contact surface 10b against the polished surface of the propellent-actuated device 12; causing a light to be incident ON a light entrance surface 10a and, when reflecting a refracted light ON the contact surface 10b and totally reflecting the light ON a contact surface 12b corresponding to a recessed part of the propellent-actuated device 12 not abutting ON the contact surface 10b and diffusely reflecting the light ON the contact surface 10b corresponding to a protruded part of the propellent-actuated device 12 abutting ON the contact surface 10b; and receiving the reflected light exiting from the side of an observation surface 10c of the prism 10, by a light receiving section 22, thereby observing the surface state of the polished surface according to the state of the received light. PCOPYRIGHT: (C)2010 and JPO& INPIT