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The general expression Pb which was formed the piezoelectric body thin film and the piezoelectric body component which uses this, the piezoelectric actuator
The general expression Pb which was formed the piezoelectric body thin film and the piezoelectric body component which uses this, the piezoelectric actuator
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机译:形成压电体薄膜和使用其的压电体成分的通式Pb,压电致动器
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摘要
There are disclosed a piezoelectric thin film having less non-uniform portions and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1−x)Lax(ZryTi1−y)O3 (where 0≦̸x1, 0.05≦̸y≦̸1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.
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