Slide stage and the XY-direction movable slide stage

摘要

A slide stage can be made low and compact, can transfer smoothly at a high speed and in high precision, and can be manufactured at a low price. A surface table (1) and a slider (4) are dug, and the slider (4) for injecting air downward to the face of the surface table (1) and linear motors (7 and 8) having an electromagnetic suction force are combined. The vertical guides are restrained by the repulsion between the air and the electromagnetic suction force, and the transverse directions are retrained only by the repulsion of the air. A locating device (9) having a guide reference face and a driving-thrust generating face made coextensive and considering an Abbe's error is disposed over the central portion of the slide stage.