SLIDE STAGE, AND SLIDE STAGE MOVABLE IN X- AND Y-DIRECTIONS

摘要

At the same time and it can be made compact low height of the stage, also smooth transport and to obtain a high-speed, high-accuracy, and provides a sliding stage can be produced at low cost. The surface plate 1 and the slider 4, the insert wave, combination of the linear motor with the air down the base 1 the slider bursting on the surface 4 and the electron attractive force (7,8), and the guides in the vertical direction is air and is bound to the repulsion of the electron attractive force, the transverse direction is bound to the repulsion of the air only, matching the guide plane and the driving force generating surface and also a position detecting device (9) in consideration of the Abbe error at the center upper part of the slide stage It was installed. ;