Displacement detecting device, control device, machine tool equipment, irradiation apparatus and displacement detection method

摘要

PROBLEM TO BE SOLVED: To reduce errors of displacement detected by displacement detection means like an encoder.;SOLUTION: In a displacement detection device including displacement detection means 10 which detects displacement as an output of an actuator 17, a plurality of ratios of an amplitude of displacement detected by the displacement detection means 10 in response to supply of a vibrating drive command Tm to the actuator 17 and an amplitude of the drive command Tm are acquired in a preliminarily determined range, and correction means 18 is provided which corrects the displacement detected by the displacement detection means 10, on the basis of the plurality of acquired ratios.;COPYRIGHT: (C)2013,JPO&INPIT