Sheet feeding apparatus and method supply, as well as the sheet sticking apparatus and sticking method

摘要

PROBLEM TO BE SOLVED: To provide a sheet supply device and a supply method capable of surely separating and supplying an adhesive sheet from a separation sheet, a sheet sticking device and a sticking method capable of efficiently sticking the adhesive sheet to a coating body in a short time.;SOLUTION: When separating and supplying a mount sheet MS as the adhesive sheet by the sheet supply device 3, while vibrating a peel plate 71 by a vibrating body 72, among a delivered original roll R, the separation sheet RL is deflected and carried by the peel plate 71, and the mount sheet MS is separated ad supplied from the separation sheet RL. The sheet sticking device 1 presses and sticks the mount sheet MS separated by the sheet supply device 3 in this way to a wafer W by a pressing roller 4.;COPYRIGHT: (C)2011,JPO&INPIT