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Optical Waveguide Element Evaluation Apparatus and Optical Waveguide Element Evaluation Method
Optical Waveguide Element Evaluation Apparatus and Optical Waveguide Element Evaluation Method
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机译:光学波导元件评估装置和光学波导元件评估方法
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摘要
The present invention provides an optical waveguide element evaluation apparatus in which stray light is separated and the distribution of light angles of an optical waveguide element can be evaluated. An optical waveguide element evaluation apparatus includes optical path setting devices that image a near-field pattern at an end face of emission light from an optical waveguide element in the air; a pinhole plate that includes opening portions which the imaged near-field pattern penetrates; and a detection unit that detects the spread angle of the light at the end face of the emission light using a far-field pattern formed of the light penetrating the pinhole plate.
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