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SILICON PHOTOMULTIPLIER AND METHOD OF MANUFACTURING SILICON PHOTOMULTIPLIER
SILICON PHOTOMULTIPLIER AND METHOD OF MANUFACTURING SILICON PHOTOMULTIPLIER
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机译:硅光电倍增器和制造硅光电倍增器的方法
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摘要
Provided is a structure of a silicon photomultiplier including an insulating layer to isolate pixels in the silicon photomultiplier and a quench resistor formed on the insulating layer to maximize the size of a light-receiving area, and a method of manufacturing the silicon photomultiplier.
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