Silicon photomultiplier (improved) and cell for silicon photomultiplier

摘要

Topic Atomic nucleus technology, it is possible to use with laser technical field and tomography etc for industry and medical application, the detector which detects the light which includes the visible optical territory at high efficiency is offered.SolutionsAs for this invention, atomic nucleus technology, it is possible in regard to the optical recording detector of high efficiency, to use with laser technical field and tomography etc for industry and medical application. The silicon photomultiplier of this invention (1st execution form), it has the baseplate of p++ electric conduction type of 1018 - 1020 cm^-3 doping density, the aforementioned multiplication tube consists of the plural cells. It has with the epitaxial layer of the p electric conduction type where each cell 1018 - 1014 cm has change possible doping density gradually with^-3, grew on the aforementioned baseplate and the layer of the p electric conduction type where has 1015 - 1017 cm^-3 doping density and the layer of the n+ electric conduction type where has 1018 - 1020 cm^-3 doping density, the polysilicon resistant department which connects with the layer and the supply bar of the aforementioned n+ electric conduction type is arranged with respect to silicon dioxide layer of each cell, the separated part is arranged between the cells. The aforementioned silicon photomultiplier (2nd execution form), it has the baseplate of the n electric conduction type where layer of p++ electric conduction type of 1018 - 1020 cm^-3 doping density was formed. This multiplication tube consists of the plural cells, in each cell, the polysilicon resistant department is arranged with respect to silicon dioxide layer, in addition, the separated part is arranged between the cells. Selective figure Figure 2