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ELECTRONIC COMPENSATION OF CAPACITIVE MICRO-MACHINED SENSORS PARASITIC MODES IN FORCE-FEEDBACK INTERFACE SYSTEMS
ELECTRONIC COMPENSATION OF CAPACITIVE MICRO-MACHINED SENSORS PARASITIC MODES IN FORCE-FEEDBACK INTERFACE SYSTEMS
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机译:力反馈界面系统中电容式微机械传感器寄生模式的电子补偿
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摘要
Operating capacitive sensors in force feedback mode has many benefits, such as improved bandwidth, and lower sensitivity to process and temperature variation. To overcome, the non-linearity of the voltage-to-force relation in capacitive feedback, a two-level feedback signal is often used. Therefore, a single-bit Σ-Δ modulator represents a practical way to implement capacitive sensors interface circuits. However, high-Q parasitic modes that exist in high-Q sensors (operating in vacuum) cause a stability problem for the Σ-Δ loop, and hence, limit the applicability of Σ-Δ technique to such sensors. A solution is provided that allows stabilizing the Σ-Δ loop, in the presence of high-Q parasitic modes. The solution is applicable to low or high order Σ-Δ based interfaces for capacitive sensors.
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