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MICROCRYSTALLINE SILICON THIN FILM SOLAR CELL AND THE MANUFACTURING METHOD THEREOF
MICROCRYSTALLINE SILICON THIN FILM SOLAR CELL AND THE MANUFACTURING METHOD THEREOF
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机译:微晶硅薄膜太阳电池及其制造方法
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摘要
The present invention relates to a microcrystalline silicon thin film solar cell and the manufacturing method thereof, using which not only the crystallinity of a microcrystalline silicon thin film that is to be formed by the manufacturing method can be controlled and adjusted at will and the defects in the microcrystalline silicon thin film can be fixed, but also the device characteristic degradation due to chamber contamination happening in the manufacturing process, such as plasma enhanced chemical vapor deposition (PECVD), can be eliminated effectively.
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