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Design For Spacer Resin Pattern Helping to Reduce Optical Coupling Loss in Optical Waveguide For Light-Emitting Element or Light-Receiving Element on Semiconductor
Design For Spacer Resin Pattern Helping to Reduce Optical Coupling Loss in Optical Waveguide For Light-Emitting Element or Light-Receiving Element on Semiconductor
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机译:有助于减少半导体上的发光元件或受光元件的光波导中的光耦合损失的间隔树脂图案的设计
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摘要
Spacer resin pattern layer which precisely aligns a light-emitting element or a light-receiving element relative to both a waveguide pattern layer and electrical circuit pattern layer from the semiconductor wafer level. A substratum of resin having a through-hole provided for electrical communication with an electrical circuit pattern layer is formed on a semiconductor wafer. A truncated cone-shaped three-dimensional reflective surface is formed to guide the emitted light towards or received light from a waveguide pattern layer. A metal film is deposited planarly in a predetermined range from the center when positioned relative to the position of the through-hole. A truncated cone-shaped mold is stamped in the center. By modifying the direction of the light using this tapered structure, the precision tolerance is increased and optical loss is reduced.
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