Formation of a wedge-shaped element on an end face of a microstrip optical waveguide designed to minimize loss when coupling with an optical fiber

摘要

We have investigated a method for forming microstrip optical waveguides of variable cross section designed for coupling a planar waveguide with an optical fiber. The method is based on the use of combined reactive-ion etching of polymer cladding and photoresist. It is shown that butt expansions and a microstrip waveguide can be formed in one technological process. The influence of the conditions of reactive-ion etching on the quality of the waveguide optical surface is analyzed.