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CONTROLLING LATERAL TWO-DIMENSIONAL ELECTRON HOLE GAS HEMT IN TYPE III NITRIDE DEVICES USING ION IMPLANTATION THROUGH GRAY SCALE MASK
CONTROLLING LATERAL TWO-DIMENSIONAL ELECTRON HOLE GAS HEMT IN TYPE III NITRIDE DEVICES USING ION IMPLANTATION THROUGH GRAY SCALE MASK
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机译:通过灰阶离子注入离子控制III型氮化物中的二维二维电子气孔
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摘要
A high electron mobility field effect transistor (HEMT) includes a two dimensional electron gas (2DEG) in the drift region between the gate and the drain that has a non-uniform lateral 2DEG distribution that increases in a direction in the drift region from the gate to the drain.
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