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PITCH QUARTERING TO CREATE PITCH HALVED TRENCHES AND PITCH HALVED AIR GAPS
PITCH QUARTERING TO CREATE PITCH HALVED TRENCHES AND PITCH HALVED AIR GAPS
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机译:变桨距以创建变桨距的沟槽和变桨距的空气间隙
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摘要
A silicon structure is fabricated determining a pattern for wire trenches and air gaps. The wire trenches are created, and certain trenches are used as air gaps. The remaining wire trenches are used for metallization of inter connecting wires.
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