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Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation

机译:保持恒定熔线定向的切克劳斯基晶体生长工艺炉和操作方法

摘要

A Czochralski process (“CZ”) crystal growth method and furnace having a heater capable of generating a heating zone, a crucible within the heating zone and capable of retaining a volume of molten crystal growth material forming a melt line oriented in a designated position within the heating zone, a seed growth rod retractable from the crucible with a rod retraction mechanism, for forming a crystal boule thereon proximal the melt line from the molten crystal growth material. The furnace causes relative movement between the crucible and heating zone as the crystal boule is retracted, so that the melt line is maintained in the designated position within the heating zone. In some embodiments relative movement is based at least in part on sensed weight of the growing crystal boule. In other embodiments the crucible growth rod retraction mechanism are fixed relative to each other by a gantry.
机译:带有加热器的切克劳斯基工艺(“ CZ”)晶体生长方法和炉子,该加热器能够产生加热区,在该加热区内具有坩埚,并且能够保持一定量的熔融晶体生长材料,从而形成定向在其内的指定位置的熔体线在加热区中,用棒缩回机构可从坩埚中缩回的籽晶生长棒,用于在熔融线附近从熔融的晶体生长材料形成结晶晶锭。当晶锭缩回时,熔炉在坩埚和加热区之间引起相对运动,从而使熔体线保持在加热区内的指定位置。在一些实施例中,相对运动至少部分地基于所感测到的生长中的晶体的重量。在其他实施例中,坩埚生长杆缩回机构通过机架相对于彼此固定。

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