MEMS actuator and MEMS actuated shutter mechanism

摘要

The present application generally describes several microelectromechanical systems (MEMS) including apparatuses, devices and systems configured for actuating a microdevice such as a shutter for use in a mobile terminal camera. One preferred embodiment described herein can include an apparatus including a curtain substantially disposed in a plane; an actuator mechanically connected to the curtain; and a voltage supply electrically connected to the actuator such that in response to a predetermined voltage the actuator thermally expands and thereby causes displacement of the curtain within the plane.