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Method for packing solid organometallic compound and packed container

机译:固体有机金属化合物的包装方法及包装容器

摘要

A method for packing a solid organometallic compound into a container for packing the compound is provided, wherein the solid organometallic compound can be stably supplied to a vapor phase epitaxial growth apparatus such as an MOCVD apparatus at a constant concentration for a long period of time. In the method for packing a solid organometallic compound into a container for packing, the compound is composed of grains having a grain size of 8 mm or less and the grains of the compound essentially comprise grains having a grain size of 2.5 to 6 mm.
机译:提供一种将固体有机金属化合物填充到用于包装化合物的容器中的方法,其中可以将固体有机金属化合物以恒定的浓度稳定地长时间供应到气相外延生长设备,例如MOCVD设备。在将固体有机金属化合物包装到用于包装的容器中的方法中,该化合物由晶粒尺寸为8mm或更小的晶粒组成,并且该化合物的晶粒主要包括晶粒尺寸为2.5至6mm的晶粒。

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