METHOD OF PACKING SOLID ORGANOMETALLIC COMPOUND AND PACKING CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a method of packing a solid organometallic compound in a packing container for solid organometallic compound that can stably supply the compound to a vapor-phase epitaxial growth system, such as the MOCVD system etc., at a fixed concentration for a long period.;SOLUTION: The solid organometallic compound packed in the packing container for solid organomettallic compound by the method contains grains of the compound having diameters of 0.25 mm at a rate of ≤15 wt%.;COPYRIGHT: (C)2005,JPO&NCIPI