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Mask frame assembly for thin film deposition and method of assembling the same

机译:用于薄膜沉积的掩模框架组件及其组装方法

摘要

A mask frame assembly for thin film deposition, the mask frame assembly including a frame having an opening; a plurality of masks having deposition patterns, the masks being fixed to the frame such that the deposition patterns extend over the opening; and a balance stick being fixed to the frame such that the balance stick is between two of the plurality of masks, the balance stick made from an elastically tensile material.
机译:一种用于薄膜沉积的掩模框架组件,该掩模框架组件包括具有开口的框架;多个具有沉积图案的掩模,所述掩模固定到所述框架,使得所述沉积图案在所述开口上延伸。平衡杆固定在框架上,使得平衡杆位于多个面罩中的两个之间,平衡杆由弹性拉伸材料制成。

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