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Semiconductor device comprising self-aligned contact bars and metal lines with increased via landing regions
Semiconductor device comprising self-aligned contact bars and metal lines with increased via landing regions
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机译:半导体器件,包括自对准接触条和金属线,其通孔连接区增加
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摘要
Disclosed herein is an illustrative semiconductor device that includes a transistor having drain and source regions and a gate electrode structure. The disclosed semiconductor device also includes a contact bar formed in a first dielectric material that connects to one of the drain and source regions and includes a first conductive material, the contact bar extending along a width direction of the transistor. Moreover, the illustrative device further includes, among other things, a conductive line formed in a second dielectric material, the conductive line including an upper portion having a top width extending along a length direction of the transistor and a lower portion having a bottom width extending along the length direction that is less than the top width of the upper portion, wherein the conductive line connects to the contact bar and includes a second conductive material that differs from the first conductive material.
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