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Method for damping an object, an active damping system, and a lithographic apparatus
Method for damping an object, an active damping system, and a lithographic apparatus
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机译:阻尼物体的方法,主动阻尼系统和光刻设备
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摘要
A method for damping an object in two or more degrees of freedom, including measuring a position quantity at each of the two or more measurement locations; extracting from the measured position quantities a measurement signal for each dynamic mode; feeding the measurement signal of a dynamic mode to a controller unit associated with the respective dynamic mode, the controller unit providing for each dynamic mode an output signal on the basis of the respective measurement signal; and providing a control signal to each of the two or more actuators, the control signal for each actuator being based on output signals of one or more controller units.
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