DAMPING METHOD FOR AN OPERATION OF AN OBJECT USING MORE THAN TWO ACTIVE MOUNTS, AN ACTIVE DAMPING SYSTEM, AND A LITHOGRAPHIC APPARATUS USING THEREOF

摘要

PURPOSE: A damping method for an operation of an object, an active damping system, and a lithographic apparatus using thereof are provided to improve the bandwidth of a damping control system.;CONSTITUTION: A damping method for an operation of an object comprises the following steps: measuring a location amount from more than two measurement points; calculating a measurement signal of each operational mode of the object from the location amount; supplying the measurement signal to a controlling unit of a controller connected with each operational mode; and supplying a controlling signal outputted from the controller by the measurement signal to more than two actuators.;COPYRIGHT KIPO 2010