Stage for working, focused beam working apparatus and focused beam working method

摘要

The present invention efficiently processes work pieces by transferring them without bringing them outside. The present invention comprises: a stage 4 for working, which is used when working a work piece D, L by irradiating a focused beam B while observing the work piece D, L in an observation region W of a previously determined range, and possessing a table 10 having plural mount bases 2, 3 on whose upper faces 2a, 3a there can be respectively mounted the work piece D, L; and a rotation slant means 11 rotating respectively the mount base 2, 3 about a Z-axis perpendicular to the upper faces 2a, 3a and slanting the upper faces 2a, 3a to an arbitrary angle, wherein the table 10 is made possible to move so as to dispose respectively the plural mount bases 2, 3 to an inside of the observation region W.