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Method for controlling ion energy in radio frequency plasmas
Method for controlling ion energy in radio frequency plasmas
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机译:控制射频等离子体中离子能量的方法
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摘要
A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
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