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INTEGRATED OPTOELECTRONIC SENSOR FOR THE DIMENSIONAL MEASUREMENT OF 1D/2D ANGULAR AND LINEAR DISPLACEMENTS
INTEGRATED OPTOELECTRONIC SENSOR FOR THE DIMENSIONAL MEASUREMENT OF 1D/2D ANGULAR AND LINEAR DISPLACEMENTS
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机译:集成光电传感器,用于一维/二维角位移和线性位移的尺寸测量
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摘要
The invention relates to an optoelectronic sensor for the dimensional measurement of angular and linear displacements. The sensor is based on the Fourier transform of the luminous radiation which produces a speckle configuration at the surface of a piece to be measured, said configuration being generated by a laser beam which illuminates the surface of the piece to be measured, the angular distribution of the speckle pattern being cartographically configured on the surface of an image sensor placed in the Fourier plane. The sensor comprises an optical module which ensures the projection of a collimated beam generated by a laser source which illuminates the surface to be measured by means of image lenses, an aperture and a CMOS camera, all these in a telecentric configuration and an electronic module which contains electronic elements which include a digital signal processor and hardware elements for the communications between a reading subassembly and a PC.
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