SOLAR CELLS HAVING A NANOSTRUCTURED ANTIREFLECTION LAYER

摘要

An solar cell having a surface in a first material is provided, the optical device having a non-periodic nanostructure formed in the surface, the nanostructure comprising a plurality of cone -haped structures wherein the cones are distributed non-periodically on the surface and have a random height distribution, at least a part of the cone-shaped structures having a height of at least 100 nm. The first material may be SiC or GaN. A method of manufacturing a non-periodic nanostructured surface on a solar cell, is furthermore provided, the method comprising the steps of providing a surface comprising SiC or GaN, forming a thin film of a masking material on at least a part of the substrate, treating the thin film to form nano islands of the thin film material, etching the SiC or GaN in a substantially anisotropic etch and concurrently etching at least a part of the thin film masking material to form a non-periodical nano structure, the nano structure comprising a plurality of cone-shaped surface structures, whereby the structures have a random height distribution, at least a part of the structures having a height of at least 100 nm.