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Method for producing silicon fine particles and method for controlling particle diameter of silicon fine particles
Method for producing silicon fine particles and method for controlling particle diameter of silicon fine particles
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机译:硅微粒的制造方法和硅微粒的粒径控制方法
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摘要
The present invention addresses the aims and problems of providing a method of producing silicon fine particles and a method of controlling the particle size of silicon fine particles, which enable silicon fine particles having a uniform particle size to be efficiently produced. The present invention is characterized in that silicon particles are immersed in an etching solution, a light having greater energy than the band gap energy of the silicon particles is irradiated onto the silicon particles immersed in the etching solution, and thereby silicon fine particles with a smaller particle size than the silicon particles are produced while controlling the particle size.
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