首页> 外国专利> METHOD FOR MONITORING AND DETERMINING THE PROPERTIES OF LIGHT-SCATTERING SURFACE TEXTURES AND FOR REGULATING THE PRODUCTION PROCESS OF LIGHT-SCATTERING SURFACE TEXTURES.

METHOD FOR MONITORING AND DETERMINING THE PROPERTIES OF LIGHT-SCATTERING SURFACE TEXTURES AND FOR REGULATING THE PRODUCTION PROCESS OF LIGHT-SCATTERING SURFACE TEXTURES.

机译:监测和确定光散射表面纹理的特性并调节光散射表面纹理的生产过程的方法。

摘要

The invention relates to a method for monitoring and determining the properties of light-scattering surface textures and for regulating the production process of light-scattering surface textures using angle-resolved scattered light (ARS) measurements, comprising the following method steps: a) at least one parameter is selected from angle-resolved scattered light (ARS) measured values, which is calculated from at least one measured value associated with a scattering angle range and/or from the entire ARS wave shape, b) a desired value is established for the selected parameter, c) at least one condition of the production process of the surface texture is correlated with the previously selected parameter, d) a light-scattering surface texture (Oi) is produced, e) an angle-resolved scattered light (ARS) measurement of said surface texture (Oi) is carried out, f) the production process is regulated by modifying at least one condition of the subsequent production process for the surface texture (Ok, with ki), g) steps d) - e) are repeated for surface textures (Ok, with ki) and the regulation according to step f) is continued until the variation of the actual value of the selected parameter determined by means of ARS measurement from the desired value is ≤ 20%.
机译:本发明涉及一种用于使用角分辨散射光(ARS)测量来监测和确定光散射表面纹理的性质以及用于调节光散射表面纹理的生产过程的方法,该方法包括以下方法步骤:从角分辨散射光(ARS)测量值中选择至少一个参数,该角度分辨散射光(ARS)测量值是从与散射角范围相关联的至少一个测量值和/或从整个ARS波形中计算得出的; b)为选择的参数; c)表面纹理的生产过程的至少一个条件与先前选择的参数相关; d)产生光散射表面纹理(O i ),e)对所述表面纹理(O i )进行角度分辨散射光(ARS)测量,f)通过修改后续生产过程的至少一个条件来调节生产过程对表面纹理进行ss(O k ,其中 k> i ),g)步骤d)-e)对表面纹理重复( O k ,其中 k> i )并继续执行步骤f)的调节,直到所选参数的实际值发生变化通过ARS测量确定的理想值≤20%。

著录项

  • 公开/公告号WO2013182180A1

    专利类型

  • 公开/公告日2013-12-12

    原文格式PDF

  • 申请/专利权人 FORSCHUNGSZENTRUM JUELICH GMBH;

    申请/专利号WO2013DE00275

  • 发明设计人 HUEPKES JUERGEN;JOST GABRIELLE;

    申请日2013-05-17

  • 分类号G01B11/30;G01N21/956;H01L31/18;G01N21/47;

  • 国家 WO

  • 入库时间 2022-08-21 15:52:54

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号