MICRO-STRUCTURE BODY FABRICATION METHOD, AND MICRO-STRUCTURE BODY

摘要

Provided is a micro-structure body fabrication method, having a photoresist pattern forming step, whereby a gradation of a laser beam intensity is substantially increased with a simple method at photoresist exposure time, and it is possible to improve resolution. A photoresist pattern forming step is carried out wherein a photoresist pattern is formed, said photoresist pattern having an unevenness pattern upon the surface thereof, by illuminating, with a laser, a positive photoresist which is coated upon a substrate and exposing the photoresist, and developing the photoresist. Multiple exposures are carried out over a plurality of iterations, with an exposure which modulates a laser beam quantity by an in-surface location of the substrate with a gradation pattern setting in which the relationship between the in-surface location of the substrate and the laser beam quantity varies, and the unevenness pattern is formed post-development according to a total exposure quantity of the multiple exposures.