MICRO-STRUCTURE BODY FABRICATION METHOD, AND MICRO-STRUCTURE BODY

摘要

Provided is a microstructure production method which includes a photoresist pattern forming step and is capable of substantially increasing the number of gradations of a laser light intensity by a simple method during exposure of a photoresist, to thereby improve the resolution. The photoresist pattern forming step of irradiating a positive photoresist applied onto a base material with laser light to expose the photoresist to light, and developing the photoresist, thereby forming a photoresist pattern having a surface patterned with a concave and convex is carried out. An overlay exposure process in which exposure for modulating an amount of laser light depending on an in-plane position of the base material is carried out multiple times is performed by setting gradation patterns with different relations between the in-plane position of the base material and the amount of laser light, and the concave and convex pattern according to a total amount of exposure in the overlay exposure process is formed after developing the photoresist.