METHOD FOR PRODUCING AT LEAST ONE LAYER OF A SOLID-BASED THIN-FILM BATTERY, PLASMA POWDER SPRAYER THEREFOR, AND SOLID-BASED THIN-FILM BATTERY

摘要

The invention relates to a method for producing at least one layer (32) for solid-based thin-film batteries (100) by means of plasma powder spraying. The invention further relates to a plasma powder sprayer (1) for producing at least one layer (32) for solid-based thin-film batteries (100) on a substrate (33). The plasma powder sprayer comprises a plasma generation region (10), in which a plasma gas flow (13) can be generated by means of an energy source (15), and at least one mixing region (20), which is located in the plasma gas flow (13). The invention further relates to a solid-based thin-film battery (100) produced in accordance with a method according to the invention.