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METHOD FOR PRODUCING AT LEAST ONE LAYER OF A SOLID-BASED THIN-FILM BATTERY, PLASMA POWDER SPRAYER THEREFOR, AND SOLID-BASED THIN-FILM BATTERY
METHOD FOR PRODUCING AT LEAST ONE LAYER OF A SOLID-BASED THIN-FILM BATTERY, PLASMA POWDER SPRAYER THEREFOR, AND SOLID-BASED THIN-FILM BATTERY
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机译:生产至少一层固态薄膜电池,等离子粉末喷涂器和固态薄膜电池的方法
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摘要
A method for the manufacture of a layer for solid state thin-film batteries using a plasma-powder-sprayer with a plasma generation area and a mixing area spatially separated from it, including creation of a plasma gas stream from an ignition gas stream in the plasma generation area; creation of a powder-aerosol stream from a carrier gas stream from a carrier gas reservoir and powder particles from a powder reservoir, wherein the powder particles are extracted in a particular way; introduction of the powder-aerosol stream and the plasma gas stream into the mixing area, so that a plasma-powder-aerosol is formed; directing a plasma-powder-aerosol stream from the mixing area onto a substrate arranged in a coating area; and, deposition of a layer on a substrate of powder particles that are superficially fused or changed in their crystalline structure in the mixing area and/or in the plasma-powder-aerosol stream and/or in the coating area.
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