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STEERABLE MOEMS DEVICE COMPRISING A MICRO MIRROR

机译:包含微镜的可转向MOEMS设备

摘要

The present invention relates to a MOEMS (micro-opto-electro-mechanical system) device comprising: - an assembly comprising a reflecting silicon membrane (10), of which curvature is determined by the pressure of a gas contained in a cavity (12) under said membrane, said cavity being formed by two bonded silicon substrates of which at least one is micro structured, - a flexible suspension (22) to which said assembly is attached, - a frame (40) on which the flexible suspension is fixed, and - an actuation mechanism (54) connected to said assembly and able to constrain the flexible suspension (22), allowing the steering and orientation of said assembly in space.
机译:本发明涉及一种MOEMS(微光机电系统)装置,该装置包括:-包括反射硅膜(10)的组件,其反射率由空腔(12)中所含气体的压力确定。在所述膜下,所述空腔由两个粘结的硅基板形成,所述基板的至少一个是微结构化的;-柔性悬架(22),所述组件附接至所述柔性悬架;-框架(40),所述柔性悬架固定在其上; -致动机构(54),其连接到所述组件并且能够约束柔性悬架(22),从而允许所述组件在空间中进行操纵和定向。

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