BAFFLE, BAFFLE ASSEMBLY, SUBSTRATE TREATING APPARATUS INCLUDING THE BAFFLE, AND SUBSTRATE TREATING METHOD USING THE APPARATUS

摘要

The present invention provides a kind of baffles. Baffle is mounted on source space, and the offer of these gases is arrived, and by the gas. The baffle includes that first group of hole flows downward in the first supply gas; Second group of hole flows downward in the second supply gas; At third group hole, the supply of the first and second gases and their mixture air-flow are downward. ;The 2014 of copyright KIPO submissions